![]() ![]() Thermal flow sensors are the most commercially available devices for use in microfluidic systems because of their high sensitivity 3. MEMS flow sensors are either thermal or non-thermal. Because of their low power consumption, high precision, short response time, portability, and cost-effectiveness, MEMS-based flow sensors are ideal to be used in microfluidic systems 1. ![]() Thus, micro-electro-mechanical systems (MEMS) have been proposed by researchers as a means to miniaturize flow sensors. However, they are limited by bulk size, high cost, and complex connection to microchips 7. Coriolis mass flowmeter and precision syringe pump are often used for this purpose. This technology also applies to commercial products, including home pregnancy testing, virus fast testing (e.g., HIV Herpes Simplex COVID-19 and Hepatitis A, B, and C), and blood glucose detection 2, 3.Ī stable liquid flow in the microfluidic system is crucial since flow variations directly induce product failure 1, 4, 5, especially in applications, such as particle sorting and separation, flow cytometry, flow mixing, chemical synthesis, and polymerase chain reaction (PCR) 6. This technology has also been employed in biomedical applications, e.g., drug delivery, DNA/Gene analysis, and diagnosis of disease by lab-on-a-chip (LOC), or organ-on-a-chip, microreactors, and micro total analysis systems (µTAS) 1. Thanks to the possibility of using a small amount of sample, this kind of sensor has captured interest as a useful device to perform operations, including separations, reactions, or the detection of various objects, such as materials and particles. Over the recent decades, microfluidic technology has been widely used in various applications. Furthermore, according to the experimental and the simulation data, the initially curved cantilever structure had a higher bending and sensitivity level than a perfectly straight cantilever construction. The experimental data obtained by the constructed microchip had a linear trend (R 2 = 0.995) and were of good consistency with simulation results. The sensor could also be utilized multiple times with an acceptable error value. The microchip sensitivity was 0.126 µm/(µl/min) in the range of measured flow rates. According to the results, the full-scale overall device accuracy was up to ± 1.39%, and the response time of the sensor was measured to be 6.3 s. Vertical displacement of the cantilever was measured in each flowrate using a digital microscope. Different flow rates were injected using a syringe pump to test the performance of the flowmeter. The fabrication substance was Polydimethylsiloxane. A flowmeter was constructed as a curved cantilever with dimensions of 6.9 × 0.5 × 0.6 mm 3 and a microchannel carved with a CO 2 laser inside the cantilever beam. System simulation was also performed to determine the influential optimal parameters and compare the results with experimental data. In this study, a microfluidic cantilever flow sensor was designed and manufactured to monitor liquid flow rate within the range of 100–1000 µl/min. ![]()
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